THE60KD-5L is designed to meet 200mm and 300mm OEM tool speeifications
Single Channel heat exchanger
High temperature;Heat medium DI Water
User friendly touch panel display with multiple functions
Small foot print
Multiple interfaces(LAM,AMAT,AMAT-CHX,TEL)
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47,CE mark;EN61000-6-2;EN61000-6-4;ENIS012100:EN60204-33:Certilied
| Type of cooling | Watertype | |||||
| Temperature and humidity | Temperature@10～35℃ Humidity@30～70%RH | |||||
| Pump | Heat medium | DI/EG(50%) | ||||
| Heat Capacity | NO | |||||
| Temp.range | NO | |||||
| Cooling Capacity | Condition | Heat medium(℃) | ||||
| PCW supply 18°℃ | 20℃ | |||||
| Capacity | 60kW | |||||
| Temp.accuracy | ±0.1℃(@Constant Heat Load) | |||||
| Pump Capacity | 100L/min@0.4MPa | |||||
| Tank | 80L | |||||
| Piping connection | JIC5/8 | JIC5/8 | JIC5/8 | JIC5/8 | JIC5/8 | |
| Liquid contact with material | 316L | |||||
| PCW | Temp.range | 18±2℃ | ||||
| Flow | >40L/min | |||||
| Pressure range | 0.3~0.5MPa | |||||
| Piping connection | Rc1" | |||||
| Liquid contact with material | 304 | |||||
| Safety device | High temp. | Thermostat | ||||
| Water leak | Water leak sensor | |||||
| Low level | Float switch | |||||
| Pump overload | Motor breakerr | |||||
| Pump pressure | Pressure sensor | |||||
| Low flow alarm | Low flow alarm | |||||
| Sensor protection | Abnormal sensor diagnosing | |||||
| Emergency stop | EMO switch | |||||
| Circuit breaker | Over-current breaker | |||||
| Tank | 80L | |||||
| Interface | AMATEndura(替代Neslabsystem-III) | |||||
| Outer dimensions | W:600xD:600xH:900mm | |||||
| Bare weight | 150kg | |||||
| Power supply | 16A 2P~AC200～208V/50Hz/60Hz(±10%) | |||||
| 备注 | 定义客户特殊要求 | |||||
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