TD4000G is designed to meet 200mm and 300mm OEM tool specifications
Dual Channel Chiller/Chiller(Chiller/Heat Exchanger)
Wide temperature range and huge cooling capacity
User friendly touch panel display with multiple functions
Small foot print
Multiple interfaces(LAM,AMAT-CHX,TEL)
SEMI S2-0712d,S8-0712a,S10-0215,S13-0113,S14-0309,S22-0712a,F47,CE mark;EN61000-6-2;EN61000-6-4;ENIS012100:EN60204-33:Certilied
| channel | channel1 | channel2 | ||
| Temp.control | Temp.range | -40°℃~+90℃ | -40°℃~+90℃ | |
| Temp.accuracy | ±0.1℃(@Constant Heat Load) | ±0.1℃(@Constant Heat Load) | ||
| Temp.controller | Ptl00 PID Control | Ptl00 PID Control | ||
| Heat medium | Galden | Galden | ||
| Refrigerator | Capacity | 4HP | 4HP | |
| Cooling capacity | 3.0kW@-20℃ 0.8kW@-40℃ | |||
| Freon gas | R410A | R410A | ||
| Heat exchanger | Plate type heat exchanger | Plate type heat exchangerr | ||
| Condenser | Watertype | Watertype | ||
| Heater | Capacity | 4.5kW | 4.5kW | |
| Pump | Pump unit | Magnetic coupling pump | Magnetic coupling pump | |
| Motor | 1.5kW | 1.5kW | ||
| Capacity | 30L/min@0.55MPa | 30L/min@0.55MPa | ||
| Safety device | High temp. | Thermostat | Thermostat | |
| Empty protection | Float switch | Float switch | ||
| Low level | Float switch | Float switch | ||
| Pump overload | Motor breaker | Motor breaker | ||
| Pump pressure | Pressure sensor | Pressure sensor | ||
| Low flow alarm | Flow meter | Flow meter | ||
| Water leak | Water leak sensor | Water leak sensor | ||
| Sensor protection | Abnormal sensor diagnosing | Abnormal sensor diagnosing | ||
| Refrigerator overload | Motor breaker | Motor breaker | ||
| Refrigerator pressure | Pressure sensor | Pressure sensor | ||
| Emergency stop | EMO switch | EMO switch | ||
| Circuit breaker | Over-current breaker | Over-current breaker | ||
| Piping connection | Coolant inlet | 1/2卡套(默认)或3/4卡套 | 1/2卡套(默认)或3/4卡套 | |
| Coolant outlet | 1/2卡套(默认)或3/4卡套 | 1/2卡套(默认)或3/4卡套 | ||
| Facility Water inlet | Rc3/4"内螺纹 | Rc3/4"内螺纹 | ||
| Facility Water outlet | Rc3/4"内螺纹 | Rc3/4"内螺纹 | ||
| Reservoir tank+Heater tank | 12L | 12L | ||
| Interface | LAM Analog;CHX;LAM-LonWorks;TELDRM/SCCM;SMC | |||
| Outer dimensions | W:550xD:850xH:1600mm | |||
| Bare weight | 330kg | |||
| Power supply | 208VAC±10%50A 3-phase | |||
| 备注 | 定义客户特殊要求 | |||
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